MEMS

The full text for most of these papers may be found at the IEEE website at www.ieee.org.

A. Baharin, M. R. Hashim,
"Study of electrical characteristics of Ge islands MSM photodetector structure grown on Si substrate using conventional methods"
Semiconductor Science and Technology, Vol. 22, No. 8, Aug. 2007, pp. 905-910.

T. Schmidt, K. Hahna, T. Binderc, J. Poppb, A. Wagener, R. Brück,
"Optimization of MEMS fabrication process design by virtual experiments"
Proceedings of SPIE - The International Society for Optical Engineering Vol. 5-8 Dec. 20, 2006

T. Bourouina, T. Masuzawa, H. Fujita,
"The MEMSNAS process: Microloading effect for micromachining 3-D structures of nearly all shapes"
Journal of Microelectromechanical Systems, Vol. 13, Issue 2, April 2004, pp. 190-199.