VICTORY Process

3 Year Development Roadmap

VICTORY Process Core

• Support for odd geometrical mesh refinement ratios to improve accuracy
• Continuous work on reducing the number of mesh nodes in the mesh exported to VICTORY Device

Etching / Deposition

• Speed-up calculations of primary and secondary etching and deposition fluxes
• Add multi-threading for re-distancing scheme to speed-up all geometrical and physical etching and deposition steps

Dopant Diffusion

• Introduce temperature gradient effects for dopant diffusion (laser annealing)
• Introduce stress effects for dopant diffusion
• Continue to improve enabling larger time steps for dopant diffusion
• Continue to improve multi-core performance of linear solvers for dopant diffusion and oxidation

Oxidation

• Implement linear viscoelastic model for physical oxidation
• Implement non-linear viscoelastic model for physical oxidation
• Continue to improve iteration strategy for non-linear physical oxidation

Last Revised 05/11/2012