VICTORY Process

90-Day Development Roadmap

VICTORY Process Core

Add

• Flag NODOPING to OPTION statement for debugging
• Flag NOPHYSICALOXIDATION to OPTION statement for debugging
• Parameter DIFF.STRESS to MATERIAL statement
• Enable implicit definition of simulation domain by means of a mask file
• Parameter PADDING to INIT statement
• Parameter PADDING.XM to INIT statement
• Parameter PADDING.XP to INIT statement
• Parameter PADDING.YM to INIT statement
• Parameter PADDING.YP to INIT statement
• Parameter QUARTER.XMYM to INIT statement
• Parameter QUARTER.XMYP to INIT statement
• Parameter QUARTER.XPYM to INIT statement
• Parameter QUARTER.XPYP to INIT statement
• Parameter HALF.XM to INIT statement
• Parameter HALF.XP to INIT statement
• Parameter HALF.YM to INIT statement
• Parameter HALF.YP to INIT statement
• Native support (outside DECKBUILD environment) for SYSTEM statement
• Introduce symmetry condition for mask at domain boundaries
• Parameter OLDMASKEDGE to OPTION statement
• Multi-layer re-distancing to improve numerical accuracy of structure representation
• Parameter REDISTANCEML to GEOMETRYETCH statement
• Parameter REDISTANCEML to GEOMETRYDEPO statement
• Parameter REDISTANCEML to CMP statement
• Parameter REDISTANCEML to ETCH statement
• Parameter REDISTANCEML to DEPOSIT statement
• Parameter REDISTANCEML to IONMILL statement
• Parameter REDISTANCEML to IBD statement

Dopant Diffusion

• New stream 'streamfullcpl' to diffusion modeling engine
• New diffusion model 'fullcpl' to open diffusion model library
• Enable direct linear solver XMS for diffusion simulation
• Add version check for the open diffusion model library to avoid compatibility problems
• Add function modelconfiguration_<model_name> to configure numerical model parameters, to open diffusion model library
• Add model parameters for model 'fullcpl' to open material database
• Improve consistency with ATHENA in interstitial / vacancy recombination parameter
• Extend function modelspecies_<model_name> in open diffusion model library to allow for enabling steady-state mode
• Introduce 'not strict positive' mode in numerical time integration engine of diffusion module to allow for larger time steps
• Add parameter DIF.STRICTPOSITIVE to DIFFUSE statement
• Improve diffusion modeling parameters in open material database to improve consistency between ATHENA and VICTORY Process

Oxidation

• Add oxidation induced stress-dependence of oxygen diffusion in oxide within physical oxidation
• Add oxidation induced stress-dependence of oxidation reaction in oxide within physical oxidation
• Extend open material database with stress-dependency coefficients for physical oxidation
• Improve silicon / gas interface model (sharp interface) to more efficiently handle narrow vertical features

Last Revised 05/11/2012